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Here in the  MEMS characterization and motion lab, we conduct fundamental and applied research in the areas of MEMS dynamics and statics including both linear and nonlinear  aspects. Our research involves designing, modeling, simulating, characterizing, and testing vast variety of MEMS devices and applications.    

 

 Our lab contains the state-of-the-art computational capabilities, such as the multi-physics finite-element software ANSYS, COMSOL, MATLAB, MATHMATICA, and FORTRAN, beside assortment of high-speed computers and workstations. The lab also hosts and has access to variety of experimental equipments and devices that enable the characterization of micro and Nano-scale structures and devices. These include   MEMS vibration and topology measurement system: Polytec MSA-400 Micro System Analyzer, Wyko Profilometers, SEM, AFM, Nanoindenter,  laser vibrometers, shakers and shaker tables with controllers,   custom-made vacuum-chamber-pressure systems for measuring squeeze-film damping effects in MEMS,  drop tables, and labVIEW and Siglab DSP data acquisition systems

The MEMS Characterization

and Motion Lab